Index Catalog // Carleton University Institutional Repository

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Filtering by: Creator Waldron, P. D.

Low temperature plasma etching for Si3 N4 waveguide applications

Resource Type:

Article

Creator:

Vandusen, R., Tarr, Gary, Waldron, P. D., Celo, Dritan, Smy, Tom, and Albert, Jacques

Date Created:

2008-03-10